Piezoelectric MEMS Technology

May 10, 2023

A group of researchers at the Indian Institute of Technology Madras and the Defence Research and Development Organisation (DRDO) has successfully developed a new sensor technology for underwater communications. The technology can be applied by the Navy and has the potential to revolutionize underwater communication technology.

Development of Piezoelectric MEMS Technology

Piezoelectric MEMS technology is an important component for developing high-performance thin films that can be used for acoustics and vibration-sensing applications. Researchers at the DRDO and IIT Madras have successfully created the piezo MEMS process recipe for the complete fabrication of an acoustic sensor. The PZT thin film-based acoustic sensor they fabricated exhibits higher performance than the conventional PVDF-based acoustic sensor.

Advantages of Indigenous Technology

One of the significant advantages of this indigenous technology is that the cost of fabrication is relatively lower than international foundries, which have limited foundries available. The Navy can use this technology to fabricate high-performance piezo MEMS acoustic devices at a lower cost. This technology also enables researchers to develop devices that are more advantageous for defence applications.

Challenges of Piezoelectric MEMS Technology

The piezo MEMS process technology is not without its challenges, which include the need for high reliability and durability in harsh underwater environments, high pressure, and the corrosive nature of seawater. Developing technology that can withstand these challenges is crucial for improving the performance of piezo MEMS devices.

Significance of the Piezo Thin Film

The piezo thin film is an essential component of piezo MEMS devices as it enables the conversion of mechanical energy into electrical energy. The successful development of the piezo MEMS process recipe means that researchers can fabricate acoustic sensors without degrading the functionality of the piezo thin film. The fabricated sensors exhibit higher performance than conventional sensors, making them ideal for use in harsh underwater environments.

Potential Applications of Piezo MEMS Devices

Piezo MEMS devices have a range of applications in acoustics and vibration-sensing, making them useful in the development of underwater communication devices. The Navy can use these devices to enhance communication and sensing in harsh underwater environments to ease their operations and capability.

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